XC-0C Mini Series Line Camera
轻小便于安装,速度可达80kHz,单颗像元尺寸达7um!
非常适合晶圆原片及其它平面高速的缺陷检测!
Compact and Easy Installation with 7um Pixel Size and 80kHz Line Rate,
A Suitable Solution for Raw Wafer and Flat Surface High Speed Defect Inspection.
XC-0C Mini Series Line Camera
轻小便于安装,速度可达80kHz,单颗像元尺寸达7um!
非常适合晶圆原片及其它平面高速的缺陷检测!
Compact and Easy Installation with 7um Pixel Size and 80kHz Line Rate,
A Suitable Solution for Raw Wafer and Flat Surface High Speed Defect Inspection.
Camera No. | Scan Width | Resolution | Total Pixels | Working Distance | Focal Depth | Line Rate(kHz) | Scan Speed | Dimension(mm) | ||
Height | Depth | Width | ||||||||
XC-0C*00140 | 14 | 3600 | 2,048 | 5/17 | ±0.06 | 80 | 560 | 56 | 56 | 56 |
XC-0C*00280 | 28 | 4,096 | 80 | 560 | 56 | 56 | 56 | |||
XC-0C*00560 | 56 | 8,192 | 72.4 | 506 | 118 | 57.3 | 87 |