
                        
XC-0H Micro Series  Line Camera
分辨率可达67,200dpi(375纳米),非常适合晶圆表面高精度瑕疵检测!
Advanced and Unique Pixel Size up to 375nm,
A Suitable Solution for Wafer Surface High Precision Defect Inspection.
XC-0H Micro Series  Line Camera
分辨率可达67,200dpi(375纳米),非常适合晶圆表面高精度瑕疵检测!
Advanced and Unique Pixel Size up to 375nm,
A Suitable Solution for Wafer Surface High Precision Defect Inspection.
Camera No.  | Scan Width  | Resolution  | Miniature  | Pixel Size  | Total  | Working Distance  | Focal Depth  | Highest  | Others  | Highest  | Others  | Dimension(mm)  | ||
Line Rate(kHz)  | Scan Speed  | |||||||||||||
XC-0H*00040  | 4.0  | 67,200 to 8,400  | 7  | 375nm to 3.0um  | 10,680  | 52.4  | ±0.06  | 3.57  | 7.14  | 1.34  | *2*2*2  | 199.1  | 135  | 205  | 
XC-0H*00063  | 6.3  | 38,400 to 4,800  | 4  | 660nm to 5.28um  | 9,600  | 52.4  | 2.36  | |||||||
XC-0H*00140  | 14.0  | 19,200 to 2,400  | 2  | 1.32um to 10.5um  | 10,680  | 70.2  | 4.72  | |||||||
XC-0H*00280  | 28.0  | 9,600 to 1,400  | 1  | 2.64um to 21.0um  | 10,680  | 70.2  | 9.45  | |||||||